Ultra-micro-groove machining
Features
A high-precision tool is used to machine in micro-grooves via the shaper method.
A wide variety of groove types can be machined at high quality with nano-order control, under strict anti-vibration, temperature-, and humidity-controlled conditions.
A large selection of groove types is available, including corner grooves, semicircle, grating, trapezoidal, dimpled, and more.
Applicable to a wide range of fields, including display-related materials and nano-imprinted molds.
Chief machining specs
Minimum axle resolution | 1nm Nano-level cutting / shape machining (machining precision: approx. 0.1 µm) |
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Table (chuck) size | 900(X)×1500(Y) |
Constant temperature management | 23±0.05℃ |